Understanding Flow in Pressure Regulation For Semiconductor Manufacturing
A higher coefficient of flow (Cv) — which has long been the traditional metric for quantifying flow capacity — doesn’t always translate to superior pressure regulator performance. This fact is especially important in semiconductor manufacturing.
In this industry, the pressure regulator has taken center stage as a yield-boosting opportunity, enabling you to more tightly control gas delivery, increase cycle times, and improve product quality and yields. However, to select the best regulator among all the options on the market, you’ll need to understand what flow is and how it relates to performance. In particular, it’s important for you to consult flow curves rather than Cv values alone.
Read more about why flow curves provide a fuller picture of how a pressure regulator will perform over a given flow range.
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